Experimental Study of See-Saw Mode Nano-Vibration on Orifice-Type Restrictors

Slide stability is key to the aerostatic guide in ultra-precise machines; thus, it has garnered plenty of attention. Macro-scale studies are commonplace, but micro- and nano-vibration issues require more Microscope vibration mainly caused by tiny changes fluid parameters lubricating gas film, which complex no verdict. In this case, slide-gas interaction should be considered. study, widely used orifice-type restrictor was investigated for its performance. A Comsol finite-element-method fluid–structure model simulate analyze an restrictor, orifice-restrictor characteristics at nanometer scale were inspected using a high-performance laser vibrometer. The results demonstrate that see-saw mode vibrations occur restrictors, growing stronger with increased air-supply pressure. vibration’s axis speculatively determined based on orifice structures, type related number orifices. also show random natural frequencies kilohertz level. newly provided research beneficial better understanding nano-vibrations restrictors.